In principle, the highest resolution in each case is obtained with the shortest wavelengths — X-rays or γ-rays. In microscopy and microlithography, the spatial resolution of the optical system ...
Recognition of decades-long commitment to the semiconductor industry. Oberkochen, Germany / San José, USA -- Winfried Kaiser, head of Product Strategy of ZEISS Semiconductor Manufacturing Technology ...
Erlangen, Germany / San José, USA | Dr. Andreas Erdmann, head of the Computational Lithography and Optics group at Fraunhofer IISB for decades and SPIE (International Society for Optics and Photonics) ...
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